Real-time measurement of ozone in ozone-added pure water used in semiconductor processes.
The OM-UND series is a liquid-phase instrument that uses ultraviolet absorbance photometry to monitor the dissolved ozone concentration in ozone-added pure water, which is used in semiconductor processes and other applications. In terms of functionality, it employs a structure that maximizes the characteristics of each component and a system that allows for easy calibration.
~Features~
● Compact and lightweight
・The indicator conversion unit measures DIN 96×96 mm
・Detection is separated (protection grade equivalent to IP44)
● Real-time measurement method
・Ozone water can be measured directly in real-time
・The unique cell structure minimizes pressure loss, offers excellent pressure resistance, and is unaffected by bubbles
● Usability
・Zero adjustment and span adjustment using an internal check plate are possible
・The adoption of an attachment cell aimed at improving maintenance allows for span adjustment of the correction factor input
● Output
・Concentration display output
・4-20 mA measurement output
・HI/LO alarm output
・Lamp degradation open collector output (lamp display)
- Company：アプリクス
- Price：Other
